Grating being mounted on a granite vacuum chuck to test for defects down to <1 micron. The granite vacuum plate is an Odhner Holographics custom design with a flatness of 5 micron peak to peak over the entire surface.
Grating test station
Overview
Specification
Video
Test Summary
Auto-focus
System definition
Vacuum plate and mounting
Grating capabilities
Facility requirements
Software
Defect mapping
Pitch angle measurements
Wave-front characterization
Efficiency measurements
Example test grating
Stitching interferometer example
Ordering
Grating being mounted on a granite vacuum chuck to test for defects down to <1 micron. The granite vacuum plate is an Odhner Holographics custom design with a flatness of 5 micron peak to peak over the entire surface.